Automation Solutions
Our Servo Transfer Automation system represents a breakthrough in wafer handling technology, utilizing sophisticated handling tools to transfer multiple wafer products with exceptional precision and efficiency.
The system operates using multi-axis lanes that run simultaneously, achieving high Unit per Hour (UPH) performance while maintaining wafer integrity throughout the transfer process.
Main Transfer Module - Effective Bernoulli picker minimizes contact while preserving wafer integrity
Walking Beam Module - Pre-aligns wafers before transfer for optimal positioning
Rotation Module - Handles wafer orientation during loading and unloading processes
Wafer Active Aligner Module - Actively aligns wafers during various transfer operations
Main Transfer Module - Maintains wafer quality and integrity using an efficient low-contact Bernoulli picker throughout the process.
Conveyor Module - High-speed transport system minimizing delays between processes