Thermal Processing Technology
Semiconductor Wafer Test Handler Air Chiller (GT-65)
Cold testing is an essential part of semiconductor fabrication, traditionally achieved using Liquid Nitrogen (LN2) to reach low-temperature profiles. The GT-65 Air Chiller replaces LN2 with a cascaded refrigeration system, significantly reducing safety risks, operational complexity, and handling requirements. It is designed specifically for semiconductor wafer handlers, providing precise, reliable low-temperature performance for a variety of testing profiles.
Users can expect a Return on Investment (ROI) of approximately one year, depending on handler type, load, and test conditions. With a footprint comparable to a standard LN2 trolley, the GT-65 integrates seamlessly into existing production floors, offering a safe, compact, and efficient solution for cold testing operations.
Temperature Range: 30 °C to -65 °C
Airflow Capacity: 134 m³/h
Static Pressure at Ambient: 150 psi
Refrigeration System: Cascaded for enhanced efficiency
Footprint: Comparable to standard LN2 trolley