Cold tests are among the most common and crucial tests in semiconductor fabrication. Traditionally, these tests utilize Liquid Nitrogen (LN2) to achieve the necessary low-temperature profiles.
The GT-65 chiller eliminates the need for Liquid Nitrogen in semiconductor testing facilities. This air chiller employs a cascaded refrigeration system, significantly reducing the associated safety hazards. Users can anticipate a Return on Investment (ROI) of approximately one year, contingent upon the type of handlers, loads, and temperature profiles used.
Specification:
Ultra low air chiller that generate chilled air down to -70 deg C and is equipped with a mechanical refrigeration system
Temperature range from -65°C to +80°C Temperature accuracy ± 1°C
Temperature distribution in time ± 3°C Self-defrost system
Nitrogen gas (GN2) or Compressed dry air (CDA) inlet for low humidity condition. Variable air flow control to optimize temperature performance
Water/Air cooled condenser PLC system
Overall dimension compatible to standard Liquid Nitrogen cylinder
Swivel casters
Safety protection compliance to industrial standard
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