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INDUSTRIAL OVENS
SEMICONDUCTOR WAFER TEST HANDLER AIR CHILLER
Cold tests are among the most common and crucial tests in semiconductor fabrication. Traditionally, these tests utilize Liquid Nitrogen (LN2) to achieve the necessary low-temperature profiles.
The GT-65 chiller eliminates the need for Liquid Nitrogen in semiconductor testing facilities. This air chiller employs a cascaded refrigeration system, significantly reducing the associated safety hazards. Users can anticipate a Return on Investment (ROI) of approximately one year, contingent upon the type of handlers, loads, and temperature profiles used.
Specification:
- Temperature Range: 30°C ~ -65° C
- Air Flow Capacity: 134m³/h
- Type Refrigerant: R404A/R23
- Static Pressure at Ambient: 150psi
Ultra low air chiller that generate chilled air down to -70 deg C and is equipped with a mechanical refrigeration system
Temperature range from -65°C to +80°C Temperature accuracy ± 1°C
Temperature distribution in time ± 3°C Self-defrost system
Nitrogen gas (GN2) or Compressed dry air (CDA) inlet for low humidity condition. Variable air flow control to optimize temperature performance
Water/Air cooled condenser PLC system
Overall dimension compatible to standard Liquid Nitrogen cylinder
Swivel casters
Safety protection compliance to industrial standard
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